Concepedia

Publication | Closed Access

A new machine for film formation by ion and vapour deposition

DOI

42

Citations

1

References

1985

Year

Yasunori Andoh, Yasuo Suzuki, Koji Matsuda, Mamoru Satou, F. Fujimoto
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

Page 1