Publication | Closed Access
Large flow rate/high frequency microvalve array for high performance actuators
17
Citations
12
References
2006
Year
EngineeringMicrofabricationMechanical EngineeringMechatronicsMechanical SystemsHigh Performance ActuatorsActuationMicroactuatorMicropositioningInstrumentationMicrofluidicsMicro-electromechanical System
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