Publication | Closed Access
Microcantilever sensors with embedded piezoresistive transistor read-out: Design and characterization
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Citations
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References
2011
Year
Electrical EngineeringEngineeringMicrofabricationPiezoelectric NanogeneratorsPiezoelectricityPiezoelectric MaterialMicro-electromechanical SystemMicroelectronicsSensor TechnologyMicrocantilever Sensors
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