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Pull-in analysis of electrically actuated viscoelastic microbeams based on a modified couple stress theory

Materials ScienceViscoelastic MicrobeamsEngineeringMicromechanicsMicrofabricationMechanicsMechanical BehaviorMechanical EngineeringMaterial NonlinearitiesSolid MechanicsMicroactuatorMicro-electromechanical SystemVibration ControlMechanics Of MaterialsPull-in Analysis