Publication | Closed Access
Effect of Y2O3 and Yb2O3 on the microstructure and mechanical properties of silicon nitride
87
Citations
30
References
2001
Year
Materials EngineeringMaterials ScienceEngineeringMechanical PropertiesMechanical EngineeringApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicrostructureSilicon Nitride
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