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An investigation into the performance of diffusion barrier materials against copper diffusion using metal-oxide-semiconductor (MOS) capacitor structures

Materials ScienceCopper DiffusionEngineeringDiffusion ResistanceNanoelectronicsOxide ElectronicsApplied PhysicsDiffusion Barrier MaterialsSemiconductor MaterialCapacitor StructuresElectronic PackagingMicroelectronicsCharge Carrier Transport