Publication | Closed Access
Surface smoothing of single-crystal diamond (100) substrate by polishing technique
55
Citations
18
References
2011
Year
Materials ScienceMaterials EngineeringDiamond-like CarbonEngineeringMicrofabricationSurface ScienceApplied PhysicsSurface TreatmentSurface SmoothingSurface PolishingSurface Processing
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