Publication | Closed Access
An Elastically Guided Machine Axis with Nanometer Repeatability
25
Citations
3
References
2005
Year
EngineeringSoft RoboticsMicrofabricationMechanicsMechanical EngineeringMechatronicsMechanical SystemsMachine ToolElectronic-mechanical SystemNanometer RepeatabilityMicro-electromechanical System
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