Broadband Mo/Si multilayer analyzers for the 15–17 nm wavelength range

Hongchang Wang, Jingtao Zhu, Zhanshan Wang, Zhong Zhang, Shumin Zhang, Wenjuan Wu, Lingyan Chen, A. G. Michette, A. Keith Powell, Sławka J. Pfauntsch,

Thin Solid Films · 2006 · 24 citations · 13 references

Concepts

References

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