Publication | Closed Access
The deposition and characterisation of CVD tungsten silicide for applications in microelectronics
17
Citations
5
References
2002
Year
Materials ScienceCvd Tungsten SilicideEngineeringNanoelectronicsSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationChemical DepositionSilicon On InsulatorMicroelectronicsChemical Vapor Deposition
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