Influence of N, O and C impurities in a-Si:H - Concepedia

Concepedia

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Influence of N, O and C impurities in a-Si:H

42

Citations

5

References

1991

Year

Tatsuo Shimizu, Minoru Matsumoto, Masahiro Yoshita, Masahiko Iwami, Akiharu Morimoto, Minoru Kumeda

Journal of Non-Crystalline Solids

C ImpuritiesPhysicsIntrinsic ImpurityApplied PhysicsSemiconductor Device FabricationSilicon On Insulator

References

	Year	Citations

Page 1