Concepedia

Publication | Closed Access

Study of plasma mechanisms of hybrid a-SiOC:H low-k film deposition from decamethylcyclopentasiloxane and cyclohexene oxide

DOI

20

Citations

6

References

2005

Year

A. Castex, L. Favennec, V. Jousseaume, J. Bruat, Joanne Deval, B. Rémiat, G. Passemard, M. Pons
Microelectronic Engineering

References

YearCitations

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