Small area x‐ray photoelectron spectroscopy

K. Yates, R. H. West

Surface and Interface Analysis · 1983 · 42 citations · 2 references

Concepts

Abstract

Abstract Small area XPS can be easily performed on spectrometers with hemispherical analysers, in which electron transfer from sample to analyser precedes retardation. Spatial resolutions of 250 μm diameter have been achieved on a commercial spectrometer and applied to the study of a mixed phase sulphide mineral. Determination of the position and size of the analysis area has been made by a combined SEM/SAM technique.

References

2