ABLATION OF POLY(METHYL METHACRYLATE) BY A SINGLE PULSE OF SOFT X-RAYS EMITTED FROM Z-PINCH AND LASER-PRODUCED PLASMAS

Abstract

The efficiency of ablation induced in poly(methyl methacrylate) (PMMA) by single soft X-ray pulses emitted from Z-pinch and laser-produced plasmas was determined. X-ray ablation of PMMA was found to be less efficient than that of teflon (PTFE). Nonthermal effects of the radiation on the polymer structure play a key role in the mechanisms of the ablation, i.e. the ablation can be explained by the formation of radiation-chemical scissions of the polymer chain followed by blowoff of low-molecular fragment fluid into the vacuum. The most promising application of this phenomenon seems to be micropatterning/micromachining.