Field emission vacuum power switch using vertically aligned carbon nanotubes

N.L. Rupesinghe, M. Chhowalla, K. B. K. Teo, G.A.J. Amaratunga

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 46 citations · 18 references

Concepts

Abstract

A field emission vacuum switch using vertically aligned carbon nanotubes grown by a direct current plasma enhanced chemical vapor deposition is reported. Cathodes with optimized field emission properties were evaluated in diode configuration as a test vehicle for the construction of a vacuum power three terminal triode device. Limiting factors such as space charge effects involved with high current densities (more than 10 mA/cm2) are also investigated using computer simulations.

References

18