Publication | Closed Access

Infrared spectroscopy as a probe of fundamental processes in microelectronics: silicon wafer cleaning and bonding

Materials ScienceFundamental ProcessesWafer Scale ProcessingEngineeringInfrared SpectroscopySpectroscopyApplied PhysicsSilicon Wafer CleaningSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsSilicon Debugging