Characterization of LPCVD amorphous silicon carbide (a-SiC) as material for electron transparent windows - Concepedia

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Characterization of LPCVD amorphous silicon carbide (a-SiC) as material for electron transparent windows

25

Citations

30

References

2013

Year

B. Morana, G. Pandraud, J.F. Creemer, P.M. Sarro

Materials Chemistry and Physics

Materials ScienceMaterials EngineeringElectron Transparent WindowsEngineeringApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationAmorphous SolidCarbide

References

	Year	Citations

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