Publication | Closed Access
A micro-Pirani vacuum gauge based on micro-hotplate technology
119
Citations
9
References
2005
Year
EngineeringMicrofabricationMeasurementMechanical EngineeringVacuum Plasma TechnologyEducationVacuum DeviceInstrumentationInstrumentation EngineeringMicroelectronicsMicro TechnologyMicro-pirani Vacuum Gauge
| Year | Citations | |
|---|---|---|
Page 1
Page 1