Low-temperature formation of β-silicon carbide - Concepedia

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Low-temperature formation of β-silicon carbide

44

Citations

19

References

1997

Year

S. Ulrich, T. Theel, J. Schwan, V. Batori, M. Scheib, H. Ehrhardt

Diamond and Related Materials

Materials EngineeringMaterials ScienceEngineeringApplied PhysicsLow-temperature FormationSemiconductor Device FabricationCarbide

References

	Year	Citations

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