M. Scheib

Improvement of grain size and deposition rate of microcrystalline silicon by use of very high frequency glow discharge

F. Finger, P. Hapke, M. Luysberg et al. · Applied Physics Letters · 1994 · 150 citations

Engineering, Crystal Growth Technology, Glow Discharge +18

Nanocrystalline anatase TiO2 thin films: preparation and crystallite size-dependent properties

Bernd Huber, A. Brodyanski, M. Scheib et al. · Thin Solid Films · 2004 · 79 citations

Materials Science, Chemical Engineering, Engineering +9

Phase separation in magnetron sputtered superhard BCN thin films

S. Ulrich, H. Ehrhardt, T. Theel et al. · Diamond and Related Materials · 1998 · 64 citations

Engineering, Physics, Applied Physics +5

Preparation of cubic boron nitride films by radio frequency magnetron sputtering and radio frequency ion plating

S. Ulrich, James R. Scherer, J. Schwan et al. · Applied Physics Letters · 1996 · 63 citations

Materials Science, Materials Engineering, Cubic Boron +13

Cathodic arc evaporation of (Ti,Al)N coatings and (Ti,Al)N/TiN multilayer-coatings—correlation between lifetime of coated cutting tools, structural and mechanical film properties

Ferenc Wéber, Florian Fontaine, M. Scheib et al. · Surface and Coatings Technology · 2003 · 61 citations

Materials Science, Materials Engineering, Tribological Coating +11