Ion implanted grating couplers for optical waveguides

Abstract

Fabrication of grating couplers by ion implantation for thin-film optical waveguides is reported. Ion implanted grating couplers were fabricated in both Corning 7059 glass waveguides and Ti-in-diffused LiNbO3 waveguides. Experimental coupling efficiencies on the order of a few percent were observed and agree reasonably well with expected theoretical values.