Thin Solid Films · 2000 · 19 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface EngineeringSurface ScienceChemical Vapor DepositionLow-temperature PlasmasPlasma Surface TreatmentPlasma-surface InteractionsThin-film DepositionChemical Vapor Deposition MaterialsLow-temperature DepositionPlasma-assisted Chemical Vapor DepositionPlasma-enhanced Chemical Vapor DepositionPlasma-enhanced Deposition
12
Detection by emission spectroscopy of active species in plasma–surface processes
A. Ricard, T. Czerwiec, T. Belmonte et al. · Thin Solid Films · 1999 · 50 citations
R. Ham · Chemie Ingenieur Technik · 1993 · 44 citations
Natural Sciences, Materials Engineering, Materials Science +12