Concepedia

Publication | Closed Access

Growth of SiO<sub>2</sub>on SiC by dry thermal oxidation: mechanisms

DOI

77

Citations

48

References

2007

Year

I. Vickridge, Jean‐Jacques Ganem, Yasushi Hoshino, I. Trimaille
Journal of Physics D Applied Physics

Abstract

International audience

References

YearCitations

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