Publication | Closed Access
A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support
50
Citations
8
References
1991
Year
PhotonicsEngineeringMeasurementMicrofabricationCalibrationOptical TestingInstrument ScienceInterferometryEducationInstrumentationElectronic InstrumentationMiniature Fabry-perot InterferometerOptical Sensors
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