Combinatorial synthesis and evaluation of epitaxial ferroelectric device libraries

Abstract

Combinatorial libraries of parallel-plate capacitors, consisting of Pt and La0.5Sr0.5CoO3 electrodes and a doped BaxSr1−xTiO3 dielectric layer, have been fabricated and analyzed to systematically study the effects of dopants on device performance. Epitaxial heterostructure libraries with sharp interfaces were generated from amorphous layers on LaAlO3 substrates. Two hundred and forty different host/dopant combinations were synthesized on a 1/2 in. by 1/2 in. substrate, with 23 capacitors for each combination. Addition of 1.5 mol % W was found to increase the figure of merit (ε/Ileak) 220-fold and reduce the high-frequency (MHz and GHz) loss tangent by fourfold.