Numerical modeling of a microwave plasma CVD reactor - Concepedia

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Numerical modeling of a microwave plasma CVD reactor

41

Citations

5

References

2001

Year

V. A. Koldanov, A. L. Vikharev

Diamond and Related Materials

EngineeringPlasma SimulationApplied Plasma PhysicMagnetohydrodynamicsComputational ElectromagneticsNumerical Modeling

References

	Year	Citations

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