Studies on Parylene C-caulked PDMS (pcPDMS) for low permeability required microfluidics applications

Abstract

This note introduced a complete fabrication strategy of Parylene C-caulked PDMS (pcPDMS) for low permeability required microfluidics applications. The bonding issue enrolled in the pcPDMS fabrication was solved based on careful surface analyses of the Parylene C caulked status in the PDMS matrix.