Fabrication of Ultrathin Films

Abstract

A method is described for the preparation of thin supported films of aluminum and carbon that can be several centimeters in diameter and contain as little as 1 μg/cm2 of material. The thickness of the prepared films is estimated to be well below 100 Å with a total pinhole area of less than 0.01%. Aluminum and carbon films prepared by this method were found capable of supporting pressure differentials of 10−3 to 10−9 mm Hg across their areas, at a maximum pressure of 10−3 mm Hg on one side.