Characterizing STI CMP Processes with an STI Test Mask Having Realistic Geometric Shapes - Concepedia

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Characterizing STI CMP Processes with an STI Test Mask Having Realistic Geometric Shapes

10

Citations

3

References

2004

Year

Xiaolin Xie, Tae Park, Duane S. Boning, Paul Allard, Neil Patel

MRS Proceedings

Geometric ModelingEngineeringSti Cmp ProcessesNatural SciencesComputer EngineeringComputer ScienceModeling And SimulationComputational Geometry

References

	Year	Citations

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