Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 10 citations · 12 references
EngineeringMaterials EngineeringMaterials ScienceImpurity ProfilingDefect CharacterizationDefects In Electronic MaterialsIon ImplantationRadiation Damage In MaterialsSemiconductor DefectsCadmium TellurideCadmium Telluride DetectorsImplantation-induced Defect FormationIon Implantation EffectsMercury Cadmium TellurideMercury Cadmium Telluride DetectorsSpatial Distribution Patterns
12