Publication | Closed Access
31.3: Rapid Laser Patterning of ITO on Glass for Next Generation Plasma Display Panel Manufacture
11
Citations
4
References
2007
Year
EngineeringLaser-plasma InteractionLaser ApplicationsLaser FabricationLaser OpticsBeam LithographyLaser Micro-processingOptical PropertiesLaser Plasma PhysicsPlasma PhotonicsIndustrial StandardsNanolithography MethodMaterials SciencePhotonicsPhysicsCost Effective AlternativeLaser Processing TechnologyLaser-assisted DepositionAdvanced Laser ProcessingMicrofabricationApplied PhysicsRapid Laser PatterningLaser-surface InteractionsMajor Cost Benefits
Abstract Rapid Laser Patterning (RLP) of ITO on glass offers a cost effective alternative to wet‐etch lithography in the manufacture of PDPs. It is demonstrated that RLP can effectively pattern ITO to industrial standards. It is also shown that the process is rapid and has major cost benefits vs. lithography.
| Year | Citations | |
|---|---|---|
Page 1
Page 1