High density contactless, self aligned EPROM cell array technology

Abstract

A revolutionary EPROM cell technology has been developed. Its suitability to realize high density memories with performance and reIiability comparable to the conventional EPROMS has been demonstrated with a 64K bit density vehicle. This self-aligned contactless cell is in a crosspoint array configuration, and occupies 33 percent less area than a conventional cell at comparable design rules. The planar, contactless technology has enhanced manufacturability, scalability and is ideally suited for memories beyond megabit density.