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Routine growth of InP based device structures using process calibration with optical in-situ techniques

Materials ScienceOptical MaterialsEngineeringProcess CalibrationWafer Scale ProcessingCalibrationOptical PropertiesRoutine GrowthApplied PhysicsOptical TestingOptical In-situ TechniquesOptical Information ProcessingElectronic PackagingInstrumentationOptical EngineeringOptoelectronics