Publication | Closed Access
Surface stress sensor using MEMS-based Fabry–Perot interferometer for label-free biosensing
31
Citations
40
References
2013
Year
Biomedical SensorsEngineeringSensorsMicrofabricationBiosensing SystemsBiomedical DiagnosticsMechanical EngineeringBioelectronicsSurface Stress SensorBiomedical EngineeringInstrumentationSensor ApplicationSensor Technology
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