Mechanical stress in thin SiO2 and Ta2O5 films produced by reactive-low-voltage-ion-plating (RLVIP) - Concepedia

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Mechanical stress in thin SiO2 and Ta2O5 films produced by reactive-low-voltage-ion-plating (RLVIP)

16

Citations

2

References

1997

Year

Georg Strauss, Nguyen Quang Danh, H.K. Pulker

Journal of Non-Crystalline Solids

Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringMicrofabricationTa2o5 FilmsSilicon On InsulatorMechanical EngineeringApplied PhysicsThin Sio2Thin FilmsChemical Vapor DepositionMechanical StressThin Film Processing

References

	Year	Citations

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