Process conditions optimization for the maximum deposition rate and uniformity in vertical rotating disc MOCVD reactors based on CFD modeling - Concepedia

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Process conditions optimization for the maximum deposition rate and uniformity in vertical rotating disc MOCVD reactors based on CFD modeling

75

Citations

8

References

2007

Year

Bojan Mitrovic, A. Gurary, W. E. Quinn

Journal of Crystal Growth

Process Conditions OptimizationEngineeringDisc Mocvd ReactorsMaximum Deposition Rate

References

	Year	Citations

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