Analysis of Improved Efficiency of InGaN Light‐Emitting Diode With Bottom Photonic Crystal Fabricated by Anodized Aluminum Oxidxe

Abstract

Abstract The improved performance of a bottom photonic crystal (PC) light‐emitting diode (LED) is analyzed based on internal quantum efficiency ( η int ) and light‐extraction efficiency ( η ex ). The bottom PC is fabricated by anodized aluminum oxide nanopatterns and InGaN quantum wells (QWs) are grown over it. Transmission electron microscopy images reveal that threading dislocations are blocked at the nanometer‐sized air holes, resulting in improved optical emission efficiency of the QWs. From temperature‐dependent photoluminescence measurements, the enhancement of η int is estimated to be 12%. Moreover, the enhancement of η ex is simulated to be 7% by the finite‐difference time‐domain method. The fabricated bottom PC LED shows a 23% higher optical power than a reference, which is close to the summation of enhancements in η int and η ex . Therefore, the bottom PC improves LED performance through higher optical quality of QWs as well as increased light extraction.