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Correlation between mass-spectrometer measurements and thin film characteristics using dcMS and HiPIMS discharges

EngineeringHipims DischargesAnalytical InstrumentationMeasurementSpectroscopyMass SpectrometryApplied PhysicsMass-spectrometer MeasurementsEducationCollision Cross SectionAnalytical ChemistryChemistryInstrumentation EngineeringInstrumentationSpectrochemical AnalysisThin Film Characteristics