Concepedia

Molecular Beam Mass Spectrometry System for Characterization of Thermal Plasma Chemical Vapor Deposition

Soonam Park, Feng Liao, J.M. Larson, Steven L. Girshick, Michael R. Zachariah

Plasma Chemistry and Plasma Processing · 2004 · 11 citations · 17 references

DOI

Concepts

References

17

A High Intensity Source for the Molecular Beam. Part I. Theoretical

Arthur Kantrowitz, Jerry Grey · Review of Scientific Instruments · 1951 · 414 citations

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Mass spectroscopic investigation of the CH3 radicals in a methane rf discharge

Hirotaka Toyoda, H. Kojima, H. Sugai · Applied Physics Letters · 1989 · 144 citations

, , +14

Separation of Gas Mixtures in Supersonic Jets

Victor H. Reis, John B. Fenn · The Journal of Chemical Physics · 1963 · 118 citations

, , +13

Hydrodynamical Theory of Diffusive Separation of Mixtures in a Free Jet

Frederick S. Sherman · The Physics of Fluids · 1965 · 81 citations

, , +12

Experimental and numerical studies of sulfur chemistry in H2/O2/SO2 flames

Michael R. Zachariah, Owen I. Smith · Combustion and Flame · 1987 · 74 citations

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