A method for cross-sensitivity and pull-in voltage measurement of MEMS two-axis accelerometers - Concepedia

Concepedia

Publication | Closed Access

A method for cross-sensitivity and pull-in voltage measurement of MEMS two-axis accelerometers

17

Citations

11

References

2005

Year

Paolo Bruschi, A. Nannini, Dario Paci, Francesco Pieri

Sensors and Actuators A Physical

Sensor CalibrationElectrical EngineeringEngineeringMeasurementCalibrationAccelerometerEducationInclinometerInstrumentationMems Two-axis AccelerometersPull-in Voltage MeasurementMeasurement SystemMicro-electromechanical System

References

	Year	Citations

Page 1