Publication | Closed Access
Minimization of focused ion beam damage in nanostructured polymer thin films
92
Citations
17
References
2010
Year
Materials ScienceIon ImplantationEngineeringElectron-beam LithographyBeam LithographyMicrofabricationPolymer ScienceApplied PhysicsNanostructured PolymerIon BeamThin Films
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