A novel long-travel piezoelectric-driven linear nanopositioning stage

Dynamic piezoelectric translation devices

Dieter Pohl · Review of Scientific Instruments · 1987 · 286 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +12

Optimal design of a flexure hinge based XYφ wafer stage

Jae W. Ryu, Dae‐Gab Gweon, Kee S. Moon · Precision Engineering · 1997 · 207 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +5

Piezodriven 50-μm range stage with subnanometer resolution

Fredric Scire, E. Clayton Teague · Review of Scientific Instruments · 1978 · 183 citations · Full text

Engineering, Materials Science, Mechanical Engineering +13

A vertical piezoelectric inertial slider

Ch. Renner, Ph. Niedermann, A. D. Kent · Review of Scientific Instruments · 1990 · 130 citations · Full text

Engineering, Mechanical Engineering, Mechatronics Engineering +14

A precision piezodriven micropositioner mechanism with large travel range

Shih‐Hui Chang, B. C. Du · Review of Scientific Instruments · 1998 · 112 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17