Enhanced generation of single optically active spins in diamond by ion implantation

Abstract

The nitrogen-vacancy (NV) centers in diamond are amongst the most promising candidates for quantum information applications. Up to now the creation of such defects was highly probabilistic, requiring many copies of the nanodevice. Here we show that by employing a two step implantation process which includes low dose N2+ molecular ion implantations followed by high dose C implantation can increase the generation efficiency of NV centers by over 50%. Moreover, we detected intrinsic N14 concentration as low as 0.07 ppb by converting the nitrogen impurities into NV and then counting the single centers by using a confocal microscope.