FTIR analysis of a-SiCN:H films deposited by PECVD - Concepedia

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FTIR analysis of a-SiCN:H films deposited by PECVD

57

Citations

32

References

2013

Year

S. Peter, Sabine Bernütz, S. Berg, Frank Richter

Materials ScienceFtir AnalysisEngineeringApplied PhysicsThin FilmsChemical Vapor DepositionThin Film ProcessingCarbide

References

	Year	Citations

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