Concepedia

Passivation of Bottom-Gate IGZO Thin Film Transistors

D. H. Cho, Se-Hoon Yang, Jaewook Shin, Chang-Woo Byun, Myung‐Jeom Ryu, J. I. Lee, Chi‐Sun Hwang, Hua Chu

Journal of the Korean Physical Society · 2009 · 37 citations · 0 references

Concepts

EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesThin FilmsMetal-oxide-semiconductor Field-effect TransistorsSemiconductor Device MaterialsSemiconductor Thin FilmsSurface PassivationThin-film MaterialsThin-film TransistorsBottom-gate ArchitecturesPassivation LayersPassivation Mechanisms