Fabrication of novel graphene–fullerene hybrid lubricating films based on self-assembly for MEMS applications

Abstract

The novel graphene-C60 hybrid films have been fabricated successfully on silicon surfaces by a multistep self-assembly process, and showed synergistic effects beyond individual performance in micro/nano-tribological behaviors. It is expected that the graphene-C60 hybrid films may find wide applications as high performance lubricating films in MEMS.