A Study of Crystallites in Obliquely Deposited Iron Films by Ellipsometry

Abstract

Optical constants and their anisotropies of obliquely deposited iron films were measured by ellipsometry, and the shape anisotropy and the anisotropy of packing density of crystallites constituting the film were estimated. Both the anisotropies obtained gave valuable informations on the formation of the columnar structure, which complement the results obtained from the measurement of the magnetic anisotropy and the observation by replica electron microscopy.