Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2002 · 186 citations · 26 references
Natural SciencesMaterials SciencePhysicsSurface ScienceThin FilmsSurface RoughnessSurface Roughness EffectsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsFocused Ion Beam PatterningIon Beam EtchingIon Beam Surface TreatmentRoughness EvolutionThin Film Surface Roughness
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