A fast, parallel acquisition, electron energy analyzer: The hyperbolic field analyzer

Abstract

This article describes a new kind of electrostatic charged particle analyzer capable of the parallel detection of a large kinetic energy range. The main purpose envisaged is for the simultaneous detection of electrons scattered from surfaces and having energies between a few tens of eV to greater than 2000 eV. A prototype has been constructed that approximates a hyperbolic deflection field for the electrons entering an entrance slit. It exhibits an energy resolution of a few eV and a collection efficiency of 0.05% of 2π sr. Useful Auger spectra can be acquired in a time of less than 2 s. The significant improvement in spectrum acquisition time that this represents offers many possibilities to further Auger and photoelectron spectroscopy.