Effect of ramping-up rate on film thickness for spin-on processing

Flow of a Viscous Liquid on a Rotating Disk

Alfred G. Emslie, Francis T. Bonner, Leslie G. Peck · Journal of Applied Physics · 1958 · 759 citations

Engineering, Mechanical Engineering, Physics +15

Characteristics of resist films produced by spinning

Dietrich Meyerhofer · Journal of Applied Physics · 1978 · 655 citations

Natural Sciences, Materials Engineering, Materials Science +13

The mechanics of spin coating of polymer films

C.J. Lawrence · The Physics of Fluids · 1988 · 324 citations

Natural Sciences, Materials Engineering, Materials Science +17

A mathematical model for spin coating of polymer resists

Warren W. Flack, David S. Soong, Alexis T. Bell et al. · Journal of Applied Physics · 1984 · 249 citations

Natural Sciences, Materials Engineering, Materials Science +17

On the Flow of a Non-Newtonian Liquid on a Rotating Disk

Andreas Acrivos, M. J. Shah, Eugene E. Petersen · Journal of Applied Physics · 1960 · 187 citations

Engineering, Mechanical Engineering, Physics +16